光刻照明模式产生装置

Photoetching lighting mode generator

Abstract

The invention relates to a photoetching lighting mode generator. The photoetching lighting mode generator comprises a line polarizer, a diffraction optical element, a zooming lens group, a polarizing beam splitter, a quarter-wave plate, a convex cone mirror and a planar reflection mirror. According to the photoetching lighting mode generator, a concave cone mirror is not required, the processing difficulty is lowered, and the photoetching lighting mode generator has the characteristic of being compact in structure.
一种光刻照明模式产生装置,该装置包括线起偏器、衍射光学元件、变焦镜组、偏振分光器、四分之一波片、凸锥形镜和平面反射镜,本发明无需使用凹锥形镜,减小了加工的难度,并且具有结构紧凑的特点。

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Patent Citations (3)

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