一种用于匹配器设备的空气电容结构

Air capacitor structure for matcher equipment

Abstract

本发明涉及等离子刻蚀、淀积设备技术领域,具体涉及一种用于匹配器设备的空气电容结构。所述空气电容结构,包括电容片和连接所述电容片的连接杆,所述连接杆上固定设有连接柱,所述连接柱将镀银线圈与所述连接杆连接。本发明通过在空气电容的连接杆上设置连接柱,在等离子体工艺中实现通过空气电容的大电流分布均匀,有利于提高电容耐电流的能力,提高电容的容量范围,直接提高空气电容使用寿命,提升了匹配性的可靠性能,增加了整机设备的使用寿命。
The invention relates to the technical field of plasma etching and depositing equipment and specifically relates to an air capacitor structure for matcher equipment. The air capacitor structure comprises a capacitor piece and a connecting rod connected with the capacitor piece; a connecting column is fixedly arranged on the connecting rod; and a silver jacketed coil is connected with the connecting rod by the connecting column. Through arranging the connecting column on the connecting rod of the air capacitor, the heavy current running through the air capacitor in a plasma technology is distributed evenly, thus the current resistance of the capacitor is favorably improved, the capacity range of the capacitor is improved, the service life of the air capacitor is improved directly, the reliability of the matching property is enhanced and the service life of the total equipment is prolonged.

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